Surface acoustic wave substrate

Details Surface acoustic wave substrate Surface acoustic wave substrate

2008-05-20

2008-05-20

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

11542613

ABSTRACT:
A surface acoustic wave substrate includes: a diamond layer; a piezoelectric layer of aluminum nitride; and a titanium nitride-based buffer layer sandwiched between the diamond layer and the piezoelectric layer. The titanium nitride-based buffer layer includes a graded structure or includes a first sub-layer of titanium and a second sub-layer of titanium nitride sandwiched between the first sub-layer and the piezoelectric layer.

REFERENCES:
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patent: WO/89/08949 (1989-09-01), None
V. Mortet, et al., Surface acoustic wave propagation in aluminum nitride-unpolished freestanding diamond structures, Applied Physics Letters, vol. 81, No. 9, Aug. 26, 2002, pp. 1720-1722.
G. Vogg, et al., High quality heteroepitaxial AIN films on diamond, Journal of Applied Physics, vol. 96, No. 1, Jul. 1, 2004, pp. 895-902.

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