Surface acoustic wave sensor methods and systems

Details Surface acoustic wave sensor methods and systems Surface acoustic wave sensor methods and systems

2007-01-23

2007-01-23

Williams, Hezron (Department: 2856)

Measuring and testing

Vibration

Sensing apparatus

C073S778000, C073S862042, C310S31300R, C310S31300R

Reexamination Certificate

active

11017171

ABSTRACT:
Sensor systems and methods are disclosed herein, including a sensor chip, upon which at least two surface acoustic wave (SAW) sensing elements are centrally located on a first side (e.g., front side) of the sensor chip. The SAW sensing elements occupy a common area on the first side of the sensor chip. An etched diaphragm is located centrally on the second side (i.e., back side) of the sensor chip opposite the first side in association with the two SAW sensing elements in order to concentrate the mechanical strain of the sensor system or sensor device in the etched diagram, thereby providing high strength, high sensitivity and ease of manufacturing thereof.

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