Surface acoustic wave sensor

Details Surface acoustic wave sensor Surface acoustic wave sensor

2004-04-08

2010-10-19

Soohoo, Tony G (Department: 1797)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S31300R, C310S31300R, C422S088000, C073S019030, C073S024010, C073S031060

Reexamination Certificate

active

07816837

ABSTRACT:
A surface acoustic wave sensor for detecting a target substance by measuring the change in frequency due to the mass applied to a reaction membrane placed on a surface acoustic wave element having high sensitivity due to the improvement of the surface acoustic wave element structure. The surface acoustic wave sensor includes an SH-type surface acoustic wave and a rotated Y-cut LiTaO3substrate having Euler angles (0°, 120° to 140°, 0°±5°); electrodes principally containing Au, for exciting a surface acoustic wave, the electrodes being arranged on the LiTaO3substrate; and a reaction membrane bound to a target substance or a binding substance bound to the target substance covering the electrodes arranged on the LiTaO3substrate. The interdigital transducers have a normalized thickness of about 3.0% to about 5.0%, the normalized thickness being determined by normalizing the thickness of the interdigital transducers by the wavelength of the surface acoustic wave.

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