Surface acoustic wave (SAW) based pressure sensor

Details Surface acoustic wave (SAW) based pressure sensor Surface acoustic wave (SAW) based pressure sensor

2006-04-27

2010-11-30

Caputo, Lisa M (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S753000

Reexamination Certificate

active

07841241

ABSTRACT:
A SAW based pressure sensor having a base2awith an aperture3formed therein and a substrate4mounted on the base so as to completely overlie the aperture. The substrate4is adhered to base2aso as to form a fluid tight seal around the periphery of the aperture3. A first SAW resonator5is mounted on the substrate4wholly within the region overlying the aperture3, with two further SAW resonators6, 7being mounted on the substrate wholly within a region which is stiffened by adhesion to the underlying base2a, such that the two further SAW resonators6, 7are completely decoupled from the strain field arising in the substrate due to deflections thereof.

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