Surface acoustic wave pressure sensor with microstructure...

Measuring and testing – Fluid pressure gauge

Reexamination Certificate

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C073S702000

Reexamination Certificate

active

06907787

ABSTRACT:
A pressure and temperature sensor system, the system comprising one or more microstructure temperature-sensing elements formed on a substrate within a hermetically sealed area thereof, wherein such microstructure temperature-sensing elements comprise SAW temperature-sensing elements. Additionally, one or more microstructure pressure-sensing elements can be located above a sensor diaphragm on the substrate, such that the microstructure pressure-sensing element is formed from a SAW pressure-sensing element. One or more contacts can also be provided, which assist in maintaining the hermetically sealed area and which protrude through the substrate for support and electrical interconnection of the pressure and temperature sensor system.

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Y. Vlassov, et al., “Precision SAW Pressure Sensors”, 1993 IEEE International Frequency Control Symposium, Jul. 1993, pp. 665-669.
PCT Notification of Transmittal of The International Search Report and the Written Opinion of the International Searching Authority, or the Declaration, Mailing Date: Sep. 14, 2004.

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