Surface acoustic wave pressure sensor

Details Surface acoustic wave pressure sensor Surface acoustic wave pressure sensor

2008-03-18

2008-03-18

Allen, Andre (Department: 2855)

Measuring and testing

Fluid pressure gauge

Vibration type

C073S570000

Reexamination Certificate

active

11531808

ABSTRACT:
A surface acoustic wave pressure sensor includes: a substrate and at least one flexible membrane, suspended over a cavity defined in the thickness of the substrate, the membrane being elastically deformable by a pressure applied by a fluid and being defined between a first surface facing the cavity and a second opposite surface; a SAW device comprising a layer of piezoelectric material arranged on the second surface of the membrane, the SAW device further comprising at least one SAW electro-acoustic transducer formed on one free surface of the piezoelectric layer. The piezoelectric layer is formed by deposition of piezoelectric material on the membrane and the substrate is integrated in a chip of semiconductor material, the membrane being a layer of the chip suspended over the cavity.

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P.R. Chalker et al., “Fabrication of aluminium nitride/diamond and gallium nitride/diamond SAW devices,” Diamond and Related Materials, vol. 8, 1999, pp. 309-313.

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