Measuring and testing – Gas analysis – By vibration
Patent
1997-05-29
1999-11-30
Larkin, Daniel S.
Measuring and testing
Gas analysis
By vibration
73 2406, 73 3102, 310313R, G01N 2900, G01N 2922, H01L 4108
Patent
active
059922150
ABSTRACT:
A surface acoustic wave (SAW) sensor system and associated method for accurately measuring mercury gas concentrations. The sensor includes a SAW device that may be a SAW delay-line oscillator or a SAW resonator. The surface of the piezoelectric substrate of the SAW device includes a material suitable for amalgamation with mercury. Mercury in the gaseous environment is captured with the amalgamating material so as to cause a change in the mechanical and electrical properties on the surface of the device, thereby causing a change in the frequency output of the device. The piezoelectric substrate of the SAW device is preferably coupled to a heater to permit control of the temperature at the surface of the device. The piezoelectric substrate temperature may be regulated to produce a substantial equilibrium of mercury amalgamation/desorption kinetics. Under the conditions provided by the invention, the mercury concentration in the gaseous environment can be determined.
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Caron Joshua J.
Freeman Carl J.
Haskell Reichl B.
Vetelino John F.
Caseiro Chris A.
Larkin Daniel S.
Sensor Research and Development Corp.
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