Surface acoustic wave interferometer

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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73517R, 310313B, 310329, H03H 976

Patent

active

044672357

ABSTRACT:
Disclosed is a surface acoustic wave interferometer, including a substrate on which are disposed a first reflector and a second reflector so as to define a multimode resonant cavity therebetween. A third reflector is positioned on the substrate so that a single mode resonant cavity is defined between the second and third reflectors. An input transducer generates surface acoustic waves in the single mode cavity, while an output transducer detects the interference between surface acoustic waves in the multimode and single mode cavities. A base is rigidly affixed to the substrate in the region of the single mode cavity so that a force applied to the substrate will alter the surface acoustic wave propagation characteristics within the multimode cavity.

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Ivanov, et al., An Interferometric Acoustooptic Method for Measuring High-Frequency Acoustic Losses in Isotropic and Anisotropic Materials with High Q-Factor, IEEE Trans. Sonics and Ultrasonics, vol. SU-26, p. 362, (1979).
Kino, et al., Acoustic Surface Waves, Scientific American, p. 51, (Oct., 1972).
Murray, et al., SAW Components Answer Today's Signal Processing Needs, Electronics, p. 120, (Sep. 8, 1981).

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