Surface acoustic wave gas flow rate sensor with self-heating fea

Details Surface acoustic wave gas flow rate sensor with self-heating fea Surface acoustic wave gas flow rate sensor with self-heating fea

1986-08-22

1988-02-23

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

310313R, 310313D, 73DIG4, G01F 168

Patent

active

047262257

ABSTRACT:
A surface acoustic wave device for measuring the mass flow rate of a gas includes a surface acoustic wave delay line formed of a piezoelectric substrate and having a temperature coefficient of delay on the order of 10.sup.-4 /.degree.C. The substrate has disposed thereon a transmitting and a receiving interdigital transducer, the transducers being configured to have an operating frequency in the range of from 10MHz to 1000MHz. That portion of the substrate located between the transducers defines a propagation region and has a medium deposited thereon for absorbing a portion of the acoustical and/or electrical energy flowing thereacross. This absorbed energy increases the temperature of the propagation region over that of the surrounding ambient.
A mass flow of the gas across the sensor will decrease its temperature and result in an upward shift in the resonant frequency. A suitable amplifier and resonant frequency detector may be coupled to the sensor for detecting the change in resonant frequency, thereby permitting mass flow rate measurement.

REFERENCES:
patent: 3983424 (1976-09-01), Parhs
patent: 4332157 (1982-06-01), Zemel et al.
Ahmad, "Surface Acoustic Wave Sensor" in IEEE Ultrasonics Symposium, 10/85.

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