Surface acoustic wave equipment

Details Surface acoustic wave equipment Surface acoustic wave equipment

1996-07-10

1998-09-29

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310320, 310313R, H01L 4104

Patent

active

058149171

ABSTRACT:
Aluminum is used for the interdigital transducer mounted on a piezoelectric substrate to realize a surface acoustic wave transducer having a small capacity ratio, no spurious resonance, and a low loss. A .theta. rotated Y cut lithium niobate single crystal piezoelectric substrate is used for the piezoelectric material, a metal film of which principal ingredient is aluminum is used for the interdigital transducer, the direction of the interdigital transducer is made parallel to the X-axis of the lithium niobate single crystal, and thick h and electrode pitch P of the interdigital transducer have the following relationship:

REFERENCES:
patent: 3858064 (1974-12-01), Schissler
patent: 3863497 (1975-02-01), Van De Vaart et al.
patent: 3894286 (1975-07-01), Armstrong
patent: 3940636 (1976-02-01), Perahia
patent: 5506552 (1996-04-01), Seki et al.

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