Wave transmission lines and networks – Plural channel systems – Having branched circuits
Reexamination Certificate
2006-09-05
2006-09-05
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Plural channel systems
Having branched circuits
C333S193000, C427S100000, C029S025350
Reexamination Certificate
active
07102461
ABSTRACT:
In a surface acoustic wave element according to an embodiment of this invention, raised electrodes20formed on thin film electrodes18are provided with throughholes31. Additionally, bumps26arranged on the raised electrodes20reach the thin film electrode18by going through an oxide film18aof the thin film electrodes18after part of the bumps enters the throughholes31of the raised electrodes20. By doing this, conduction is achieved between the thin film electrodes18and the bumps26formed on a piezoelectric monocrystal substrate28. Thus, a solid oxide film18ais formed on the surface of the thin film electrodes18formed from monocrystal aluminum, but part of the bumps26which enters the throughholes31of the raised electrodes20goes through this oxide film18a, so conduction between the thin film electrode18and the bump26is achieved with higher accuracy.
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Mashimo Akira
Nakano Masahiro
Sato Katsuo
Oliff & Berridg,e PLC
Summons Barbara
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