Surface acoustic wave element

Details Surface acoustic wave element Surface acoustic wave element

2011-08-23

2011-08-23

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S31300R, C310S340000

Reexamination Certificate

active

08004148

ABSTRACT:
A surface acoustic wave element includes: a diamond layer; an alumina nitride layer provided on the diamond layer; a silicon oxide layer provided on the alumina nitride layer; and a pair of electrodes provided between the alumina nitride layer and the silicon oxide layer, the electrodes applying a voltage to the alumina nitride layer. If a thickness of the alumina nitride layer is represented by H1, a thickness of the silicon oxide layer is represented by H2, a wavelength of a surface acoustic wave is represented by λ, x is defined as x=2πH1/λ, and y is defined as y=2πH2/λ, (x, y) meets all of the following formulas 1 to 4 below. That is, the formula 1 is y≦0.750×x+0.325; the formula 2 is y≦−0.300×x+1.690; the formula 3 is y≧−0.500×x+0.950; and the formula 4 is y≧0.700×x−0.610.

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