Surface acoustic wave element

Details Surface acoustic wave element Surface acoustic wave element

1989-06-20

1990-07-24

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313A, 333153, 333195, H04L 4108

Patent

active

049437518

ABSTRACT:
In a surface acoustic wave element comprising a semiconductor substrate, a piezoelectric layer formed thereon and at least one interdigital electrode disposed on the surface thereof, a semiconductor region having a conductivity type different from that of the semiconductor substrate is disposed on the outer side of the interdigital electrode just below the piezoelectric layer.

REFERENCES:
patent: 3805195 (1974-04-01), Miller
patent: 3946338 (1976-03-01), Schmidt
patent: 4013983 (1977-03-01), Hartmann
patent: 4773138 (1988-09-01), Ballato et al.

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