Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1992-05-05
1994-01-25
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310313D, 364821, H01L 4108
Patent
active
052818829
ABSTRACT:
A GaAs piezoelectric semiconductor thin film in the form of an epitaxial film is provided on a Si substrate 1, and an input transducer 3 and an output transducer 4 for input and output of a surface acoustic wave are provided on the film. A surface acoustic wave element, thus arranged, has a sound characteristic superior to that of a single crystalline GaAs substrate and permits the use of an electromechanical coupling coefficient larger than that of the single crystalline GaAs. Thus the element copes with a much higher sound velocity of SAWs.
REFERENCES:
patent: 4449107 (1984-05-01), Asai et al.
patent: 4516049 (1985-05-01), Mikoshiba et al.
patent: 4539501 (1985-09-01), Trong et al.
patent: 4567393 (1986-01-01), Asai et al.
patent: 4571519 (1986-02-01), Kawabata et al.
patent: 4752709 (1988-06-01), Fujishima et al.
patent: 4757226 (1988-07-01), Mitsutsuka et al.
patent: 4884001 (1989-11-01), Sacks et al.
patent: 4943751 (1990-07-01), Mitsutsuka
patent: 5091669 (1992-02-01), Mitsutsuka
New Modes in III-V monolithic SAW devices, by Henaff and Feldmann, 9th International Symposium on Gallium Arsenide and Related Compounds, OiSo Japan, Sep. 20-23, 1981, Inst. Phys. Conf., Ser. No. 63, Chapt. 9, pp. 455-460.
Integrated Circuit Compatible Surface Acoustic Wave Devices on Gallium Arsenide, Grudkowski et al., IEEE Transactions on Microwave Theory and Techniques, vol. MTT-29, No. 12, Dec. 1981.
Budd Mark O.
Clarion Co. Ltd.
LandOfFree
Surface acoustic wave element does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Surface acoustic wave element, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface acoustic wave element will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-730249