Surface acoustic wave devices using surface acoustic waves...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C310S363000

Reexamination Certificate

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07446453

ABSTRACT:
A SAW device includes a LiNbO3single crystal piezoelectric substrate having an orientation defined by Euler angles (λ,μ,θ), with angle λ ranging from −5° to +5°, angle μ ranging from about −74° to about −65°, and angle θ ranging from −5° to +5°. Electrode patterns on a surface of the substrate form element resonators having a metallization ratio ranging from about 0.3 to about 0.8 and electrode thicknesses ranging from about 12% to about 17.5% of an acoustic wavelength of a strongly coupled non-leaky surface acoustic wave, excited on the surface of the substrate, if Al is used as electrode material, and in a range from about 6% to about 10% of an acoustic wavelength, if Cu is used as electrode material. Such orientations simultaneously combined with an optimized electromechanical coupling of spurious surface acoustic mode provide for improved performance in RF applications with a widened passband.

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Hashimoto, Ken-Ya; Asano, Hiroki; Matsuda, Kenji; Yokoyama, Naofumi; Omori, Tatsuya; Yamaguchi,Masatsune; “Wideband Love Wave Filters Operating in GHz Range on Cu-Grating/Rotated-YX-liNbO3-Substrate Structure”; 2004 IEEE International Ultrasonics, Symposium; pp. 1330-1334.
Isobe, A.; Hikita, M.; Asai, K.; Sumioka A.; “Grating-Mode-Type Wide-Band SAW Resonators for VCOs”; 1998 IEEE Ultrasonics Symposium; pp. 111-114.

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