Surface acoustic wave device with specific electrode materials a

Details Surface acoustic wave device with specific electrode materials a Surface acoustic wave device with specific electrode materials a

1999-02-12

2000-11-28

Pascal, Robert

Wave transmission lines and networks

Coupling networks

Electromechanical filter

333195, 310313A, 310361, 310363, H03H 964

Patent

active

061541052

ABSTRACT:
A surface acoustic wave device includes a quartz substrate having an angle .theta. of Euler angles (0, .theta., 90.degree.) that satisfies 122.degree..ltoreq..theta..ltoreq.131.degree.. An interdigital transducer made of an electrode material including at least one of Ta and W is disposed on the quartz substrate.

REFERENCES:
patent: 5392013 (1995-02-01), Yamamoto et al.
patent: 5729186 (1998-03-01), Seki et al.
patent: 5831493 (1998-11-01), Ushiroku
patent: 5847486 (1998-12-01), Kadota et al.
patent: 5850167 (1998-12-01), Abe
patent: 5953433 (1999-09-01), Fujimoto et al.

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