Surface acoustic wave device with multilayer electrodes and meth

Details Surface acoustic wave device with multilayer electrodes and meth Surface acoustic wave device with multilayer electrodes and meth

1996-12-11

1999-06-01

Pascal, Robert

Wave transmission lines and networks

Coupling networks

Electromechanical filter

310313R, 310364, 29 2535, H03H 9145, H03H 925, H03H 964

Patent

active

059091568

ABSTRACT:
A surface acoustic wave device includes an electrode formed by a first film and a second film on a substrate, the first film including an Al film or a film formed by adding at least one other element to Al, and the second film including a metal whose coefficient of diffusion into Al is greater than a self diffusion coefficient of Al. The present invention contributes to improvement of the high-power durability of the electrodes.

REFERENCES:
patent: 4775814 (1988-10-01), Yuhara et al.
patent: 4942327 (1990-07-01), Watanabe et al.

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