Surface acoustic wave device with a resistor thin film to remove

Details Surface acoustic wave device with a resistor thin film to remove Surface acoustic wave device with a resistor thin film to remove

1997-01-14

1999-03-30

Pascal, Robert

Wave transmission lines and networks

Coupling networks

Electromechanical filter

310313R, 310313B, 333194, H03H 925, H03H 964

Patent

active

058894462

ABSTRACT:
A surface acoustic wave device includes a piezoelectric substrate, an interdigital electrode pattern, and a resistor thin film. The piezoelectric substrate has a piezoelectric effect. The interdigital electrode pattern is made of a conductive thin film and formed on the piezoelectric substrate to perform conversion between an electrical signal and a surface acoustic wave. The resistor thin film is formed on the piezoelectric substrate to electrically connect the piezoelectric substrate to the interdigital electrode pattern. The resistor thin film serves to remove charges from a surface of the piezoelectric substrate due to a pyroelectric effect to the interdigital electrode pattern.

REFERENCES:
patent: 4448805 (1984-05-01), Lewis
patent: 5446330 (1995-08-01), Eda et al.

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