Surface acoustic wave device using highly oriented diamond film

Details Surface acoustic wave device using highly oriented diamond film Surface acoustic wave device using highly oriented diamond film

1994-05-06

1995-03-28

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

H01L 4108

Patent

active

054020298

ABSTRACT:
A surface acoustic wave device uses a highly oriented diamond film with a planar surface, increasing the propagating velocity of a surface acoustic wave, and fabricating many devices on a large area without polishing processes. The surface acoustic wave device includes the highly oriented diamond films, a piezoelectric film and electrodes which are formed on the diamond film. In the highly oriented diamond film, 80% or more of the surface area of the diamond film is composed of the (100) faces or (111) faces of diamond; and the difference {.DELTA..alpha.,.DELTA..beta.,.DELTA..gamma.} between the Euler angles {.alpha.,.beta.,.gamma.} expressing the crystal orientations of the adjacent (100) or (111) faces of the diamond film simultaneously satisfies the relations of .vertline..DELTA..alpha..vertline..ltoreq.10.degree., .vertline..DELTA..beta..vertline..ltoreq.10.degree., and .vertline..DELTA..gamma..vertline..ltoreq.10.degree..

REFERENCES:
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patent: 4952832 (1990-08-01), Imai et al.
patent: 5235233 (1993-08-01), Yamamoto

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