Surface acoustic wave device using an elastic substrate and an a

Details Surface acoustic wave device using an elastic substrate and an a Surface acoustic wave device using an elastic substrate and an a

1983-03-09

1985-04-16

Beha, Jr., William H.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313B, 333155, H03H 944

Patent

active

045118167

ABSTRACT:
A surface acoustic wave device comprises an elastic substrate having a major surface with a given crystal orientation and having a positive temperature coefficient of delay (TCD), and AlN film deposited on the elastic substrate so that piezoelectric axis of the AlN film has a predetermined direction with respect to the major surface of the elastic substrate having a negative TCD, and electrodes provided on the AlN film or between the elastic substrate and the AlN film.

REFERENCES:
patent: 3965444 (1976-06-01), Willingham et al.
patent: 4037176 (1977-07-01), Ono et al.
patent: 4354130 (1982-10-01), Ono et al.
Tsubouchi, et al., "High-Frequency and Low-Dispersion SAW Devices on AlN/Al.sub.2 O.sub.3 and AlNSi for Signal Processing", Ultrasonics Symposium Proc., 1980, p. 446.

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