Surface acoustic wave device using a multi-layer substrate inclu

Details Surface acoustic wave device using a multi-layer substrate inclu Surface acoustic wave device using a multi-layer substrate inclu

1980-12-05

1982-10-12

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

333154, H01L 4108

Patent

active

043541305

ABSTRACT:
This invention provides a surface acoustic wave device which comprises a multi-layered substrate. The multi-layered substrate comprises at least a piezoelectric zinc oxide layer, an intermediate silicon oxide layer and an .alpha.-Al.sub.2 O.sub.3 base made of a single crystal havine an (0112) crystallographic plane or an equivalent crystallographic plane. This surface acoustic wave device is operable at ultra-high frequency.

REFERENCES:
patent: 4037176 (1977-07-01), Ono et al.
patent: 4038615 (1977-07-01), Ishiyama et al.

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