Surface acoustic wave device, surface acoustic wave...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Reexamination Certificate

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11212504

ABSTRACT:
An IDT electrode3, and an input electrode section5and an output electrode section6each connecting with the IDT electrode3are formed in a filter region on one main surface of a piezoelectric substrate2, and a semiconductor layer22is formed on the other main surface opposite to the one main surface of the piezoelectric substrate2. The semiconductor layer22makes it possible to prevent pyroelectric destruction in the device manufacturing process as well as to prevent out-of-band attenuation characteristics from being degraded.

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Akinori Miyamoto et al., “Novel Optical Observation Technique for Shear Horizontal Wave in SAW resonators on 42°YX-Cut Lithium Tantalate”, 2002 IEEE Ultrasonics Symposium, pp. 89-92.

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