Surface acoustic wave device having a specified crystalline orie

Details Surface acoustic wave device having a specified crystalline orie Surface acoustic wave device having a specified crystalline orie

1982-10-08

1984-10-30

Miller, J. D.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

333154, H01L 2720, H03H 942

Patent

active

044802099

ABSTRACT:
A surface acoustic wave device includes a silicon substrate having a main surface with a given crystalline orientation, a zinc oxide layer deposited on the main surface of the silicon substrate and a dielectric layer as well as electrodes both formed in contact with said zinc oxide layer, so that a surface acoustic wave will be propagated along a given crystalline axis direction of the silicon substrate.

REFERENCES:
patent: 3689784 (1972-09-01), de Klerk
patent: 3862431 (1975-01-01), Quate et al.
patent: 4037176 (1977-07-01), Ono et al.
Mattioco, et al., "PVF.sub.2 Transducers for Rayleigh Waves" Electronics Letters, (Mar. 27, 1980) vol. 16, No. 7, pp. 250-251.

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