Surface acoustic wave device for sensing the presence of chemica

Details Surface acoustic wave device for sensing the presence of chemica Surface acoustic wave device for sensing the presence of chemica

1985-08-07

1986-07-01

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310311, 310313D, 333153, 73 23, 422 98, H01L 4108

Patent

active

045982244

ABSTRACT:
A surface acoustic wave device is provided for sensing the presence of chemical agents by chemo-electronic means. The device includes a quartz substrate and means deposited on the substrate for propagating and receiving surface acoustic waves along the surface of the substrate. Regions are provided on the substrate containing etched tunnels, the walls of the etched tunnel being coated within with a chemical substance sensitive to the chemical agent to be detected. When surface acoustic waves are caused to pass over these regions, the reaction of the chemical agent to be detected with the chemical substance causes a change in the acoustic wave velocity.

REFERENCES:
patent: 4210722 (1980-07-01), Silver
patent: 4246344 (1981-01-01), Silver, III
patent: 4312228 (1982-01-01), Wohltjen
patent: 4343688 (1982-08-01), Harwood
Palladium-Surface Acoustic Wave Interaction for Hydrogen Detection by A. mico et al., Applied Physics Letters, vol. 41, No. 3, Aug. 1982, pp. 300-301.

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