Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2006-06-27
2006-06-27
Dougherty, Thomas M. (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S31300R, C310S324000
Reexamination Certificate
active
07067956
ABSTRACT:
A surface acoustic wave device includes a piezoelectric substrate on which resonators having comb-like electrodes are formed; and a silicon substrate that is directly bonded to the piezoelectric substrate and is less expansive than the piezoelectric substrate, a cavity being formed in the silicon substrate and being located below at least one of the resonators.
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Ikata Osamu
Imai Masahiko
Matsuda Takashi
Miura Michio
Ueda Masanori
Arent & Fox PLLC
Dougherty Thomas M.
Fujitsu Limited
Fujitsu Media Devices Limited
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