Surface acoustic wave device and method of producing the same

Details Surface acoustic wave device and method of producing the same Surface acoustic wave device and method of producing the same

1996-03-14

1998-08-18

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

H01L 4108

Patent

active

057962057

ABSTRACT:
A SAW (Surface Acoustic Wave) device includes a piezoelectric member, a heat-treated ion implantation layer formed in a surface portion of the piezoelectric member, and an electrode of a comb type resonator with reflectors provided on said heat-treated ion implantation layer. The present invention also provides a method of producing such a SAW device.

REFERENCES:
patent: 3568079 (1971-03-01), Yoder
patent: 4060777 (1977-11-01), Tiersten et al.
patent: 4353046 (1982-10-01), Hartmann
patent: 4499393 (1985-02-01), Stokes et al.
patent: 4683395 (1987-07-01), Mitsutsuka
patent: 4706239 (1987-11-01), Ito et al.
patent: 5115216 (1992-05-01), Hikita et al.
Patent Abstracts of Japan, vol. 17, No. 434 (E-1412) 11 Aug. 1993 of JP-A-05 090893 (Sumitomo Electric Ind Ltd) 9 Apr. 1993.
IEEE 1987 Ultrasonics Symposium, vol. 1, Oct. 1987, pp. 43-46.

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