Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2006-04-21
2009-10-13
Benson, Walter (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
Reexamination Certificate
active
07602099
ABSTRACT:
First base layers made of TiN or TiOxNy(where, 0<x<0.2, x+y=1) and second base layers made of Cr are provided between interdigital transducer portions and a piezoelectric substrate, and accordingly, it is possible to prevent voids from being generated in the interdigital transducer portions, which improves a power resistance of the surface acoustic wave device. In addition, since it is possible to prevent the voids from being generated in the interdigital transducer portions, it is possible to suppress the resistance of the interdigital transducer portions from increasing, which can reduce the loss of power. In addition, it is also possible to reduce the variations in a serial resonance frequency and a parallel resonance frequency.
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Fujimoto Haruhiko
Ikeda Takeshi
Meguro Toshihiro
Ozaki Kyosuke
Waga Satoshi
Addison Karen B
Alps Electric Co. ,Ltd.
Benson Walter
Beyer Law Group LLP
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