Surface acoustic wave device and method of fabricating the same

Details Surface acoustic wave device and method of fabricating the same Surface acoustic wave device and method of fabricating the same

2007-06-05

2007-06-05

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Plural channel systems

Having branched circuits

C333S193000, C029S025350

Reexamination Certificate

active

10809926

ABSTRACT:
A surface acoustic wave device includes a piezoelectric substrate having a first surface on which comb-like electrodes, first pads connected thereto, and a first film are provided. The first film is located so as to surround the comb-like electrodes. A base substrate has a second surface on which second pads joined to the first pads and a second film joined to the first film are provided. The first and second films joined by a surface activation process define a cavity in which the comb-like electrodes and the first and second pads are hermetically sealed.

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