Surface acoustic wave device and method for producing the same

Details Surface acoustic wave device and method for producing the same Surface acoustic wave device and method for producing the same

2006-01-10

2006-01-10

Tsai, H. Jey (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

C438S056000, C438S510000

Reexamination Certificate

active

06984540

ABSTRACT:
A surface acoustic wave device includes a piezoelectric substrate, a first interdigital transducer and a second interdigital transducer formed on the substrate so that the first and second interdigital transducers are opposed to each other. The substrate includes a doping region that is doped with a substance in at least one form selected from the group consisting of atoms, molecules and clusters in a surface between the first and second interdigital transducers.

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