Surface acoustic wave device and diamond base material for the s

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428408, 428212, H03H 9145

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active

057502439

ABSTRACT:
A diamond base material for surface acoustic wave device, which includes: a low-resistivity base material, and a high-resistivity diamond layer having a thickness of 5-50 .mu.m disposed on the low-resistivity base material.

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patent: 5371383 (1994-12-01), Miyata et al.
patent: 5382758 (1995-01-01), Iacovangelo et al.
Shikata et al., "Microfabrication Technique for Diamond Devices", 2ND International Conference on the Applications of Diamond Films and Related Materials (1993), pp. 377-380.
Patent Abstracts of Japan, vol. 13, No. 272, Jun. 22, 1989 and JP A 01 062911, Mar. 9, 1989.

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