Surface acoustic wave device

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C310S31300R, C310S364000

Reexamination Certificate

active

07923896

ABSTRACT:
A surface acoustic wave device including an SiO film has improved frequency temperature characteristics, prevents an increase in insertion loss, obtains a reflection coefficient of an electrode that is sufficiently high, and achieves more preferable resonant characteristics and filter characteristics. The surface acoustic wave device includes a LiNbO3substrate having a plurality of grooves formed in an upper surface thereof, an IDT electrode primarily composed of Pt provided in the grooves, a SiO2layer arranged so as to cover the upper surface of the LiNbO3substrate and the IDT electrode, a surface of the SiO2layer is planarized, a response of a Rayleigh wave is utilized, and Euler angles of the LiNbO3substrate are in a range of (0°±5°, 208° to 228°, 0°±5°).

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Official Communication issued in International Patent Application No. PCT/JP2008/068839, mailed on Jan. 13, 2009.

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