Surface acoustic wave device

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310313R, H01L 4108

Patent

active

053028775

ABSTRACT:
A surface acoustic wave device comprises lithium tetraborate single crystal substrate to make use of surface acoustic waves with higher propagation velocities and smaller propagation losses, whereby frequencies to be signal-processed can be as high as above 1 GHz. The surface acoustic wave device comprises a metal film formed on a surface of a lithium tetraborate single crystal substrate, the metal film being for exciting, receiving, reflecting and/or propagating surface acoustic waves, the metal film being so formed that a cut angle of the substrate, and a propagation direction of the surface acoustic waves are in an Eulerian angle representation of (39.degree.-51.degree., 66.degree.-114.degree., -20.degree.-20.degree.) and directions equivalent thereto. In this propagation direction few Rayleigh waves exit, and only surface acoustic waves of high propagation velocity are generated. Propagation losses can be eliminated.

REFERENCES:
patent: 4489250 (1984-12-01), Ebata et al.
patent: 4523119 (1985-06-01), Whatmore et al.
patent: 4634913 (1987-01-01), Whatmore et al.
patent: 4672255 (1987-01-01), Suzuki et al.
patent: 4868444 (1989-09-01), Shibata et al.
"Characteristics of Leaky Surface Waves Propagating on Li2B407", IEEE 1989 Ultrasonics Symposium, M. Murota, et al., pp. 291-294, 1989.
"Temperature Compensated Piezoelectric Lithium Tetraborate Crystal for High Frequency Surface Acoustic Wave and Bulk Wave Device Applications", IEEE 1985 Ultrasonics Symposium, 1985.

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