Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1990-07-06
1991-10-29
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310313R, 310363, 333193, H01L 4108
Patent
active
050618709
ABSTRACT:
A surface accoustic wave device includes a substrate which is made up of single-crystalline dielectric member and a piezoelectric thin film epitaxially grown thereon. An aluminum electrode defining an interdigital electrode is formed along the interface between the dielectric member and the piezoelectric thin film. This aluminum electrode is formed of an aluminum film which is crystallographically oriented in a constant direction, whereby stressmigration of the aluminum electrode is suppressed, while enabling epitaxial growth of the piezoelectric thin film over the entire surface insert.
REFERENCES:
patent: 4449107 (1984-05-01), Asai et al.
patent: 4511816 (1985-04-01), Mikoshiba et al.
patent: 4567393 (1986-01-01), Asai et al.
patent: 4775814 (1988-10-01), Yuhara et al.
patent: 4935658 (1990-06-01), EerNisse et al.
patent: 4942327 (1990-07-01), Watanabe et al.
patent: 4968954 (1990-11-01), Ryuo et al.
"High Freq. and Low-Dispersion SAW Devices on AlN/Al.sub.2 O.sub.3 and AlN/Si for Sig. Proc.", Conf. 1980, Ultrasonics Symposium, Boston, Mass., Nov. 5-7, 1980.
"ZnO Thin-Film SAW Devices for High Freq. Range", 10-79 National Technical Report, vol. 25, No. 5.
Ieki Hideharu
Kimura Koji
Sakurai Atsushi
Budd Mark O.
Dougherty Thomas M.
Murata Mfg. Co. Ltd.
LandOfFree
Surface acoustic wave device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Surface acoustic wave device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface acoustic wave device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1402133