Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

1995-04-26

1996-10-15

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313R, H01L 4108

Patent

active

055657257

ABSTRACT:
A SAW device which includes at least, diamond, an LiNbO.sub.3 layer disposed on the diamond, and an IDT provided so as to contact the LiNbO.sub.3 layer; and utilizes SAW of an "n-th" mode (n=0, 1 or 2) having a wavelength of .lambda..sub.n (.mu.m), wherein a parameter of kh.sub.1 =2.pi.(t.sub.1 /.lambda..sub.n) is in a specific range provided that the thickness of the LiNbO.sub.3 layer is denoted by t.sub.1 (.mu.m).

REFERENCES:
patent: 5294858 (1994-03-01), Nakahata et al.
patent: 5329208 (1994-07-01), Imai et al.
patent: 5343107 (1994-08-01), Shikata et al.
patent: 5401544 (1995-03-01), Nakahata et al.
patent: 5440189 (1995-08-01), Nakahata et al.
patent: 5446329 (1995-08-01), Nakahata et al.
Y. Miura, et al., "Preparation of ZnO Films by an Activated Reactive Evaporation Method", published Apr., 1991, pp. 379-384.

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