Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

1990-04-10

1991-10-22

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

H01L 4108

Patent

active

050598473

ABSTRACT:
A surface acoustic wave device comprising a single crystal silicon substrate and a piezoelectric thin film of single crystal or C-axis-oriented polycrystalline aluminum nitride formed on the surface of the substrate. The C-axis of the piezoelectric thin film is set in a direction in which the projection vector of the C-axis on a plane containing the axis of propagation direction of a surface acoustic wave and a normal axis of the substrate makes an inclination angle .theta. of up to 60 degrees with the axis of propagation direction, whereby the device is given a coupling coefficient of at least 2% is given as maximum coupling coefficient of the device.

REFERENCES:
patent: 4447754 (1984-05-01), Wagers
patent: 4449107 (1984-05-01), Asai et al.
patent: 4501987 (1985-02-01), Mitsuyu et al.
patent: 4511816 (1985-04-01), Mikoshiba et al.
patent: 4567393 (1986-01-01), Asai et al.
patent: 4640756 (1987-02-01), Wang et al.
patent: 4868444 (1989-09-01), Shibata et al.
patent: 4879487 (1989-11-01), Sugai et al.
Patent Abstracts of Japan, vol. 13, No. 371 (E-807), Aug. 17, 1989.
Patent Abstracts of Japan, vol. 7, No. 148 (E-184), Jun. 29, 1983.

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