Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

2005-12-29

2008-12-09

Ham, Seungsook (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C310S31300R, C310S361000

Reexamination Certificate

active

07463119

ABSTRACT:
A surface acoustic wave device has a piezoelectric substrate and an IDT formed on the piezoelectric substrate, and uses an excited wave as an SH wave. The piezoelectric substrate is a quartz plate in which a cut angle θ of a rotated Y-cut quartz substrate is set in the range of −65°≦θ≦−51° in a counter-clockwise direction from a crystal Z-axis and the propagation direction of a surface acoustic wave is set in the range (90°±5°) with respect to a crystal X-axis. The IDT is made of Ta or an alloyed metal containing Ta as the main component.

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