Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

1988-10-18

1989-09-19

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

333154, H01L 4108

Patent

active

048684449

ABSTRACT:
A surface acoustic wave device having a single crystal aluminum nitride film wherein when the direction of propagation of the surface acoustic wave is expressed by (.lambda.,.mu.,.theta.) according to the Euler angle notation, .theta. is set to 90 degrees, .lambda. to a desired angle, and .theta. to an angle in the range of 30 to 150 degrees. In a surface acoustic wave device having a c-axis-oriented aluminum nitride film, the direction of c-axis orientation of the piezoelectric film is inclined within a plane containing the direction of propagation of the surface acoustic wave and perpendicular to the surface of the piezoelectric film at an angle in the range of about .+-.30 degrees to about .+-.150 degrees with respect to a normal to the piezoelectric film. The devices are 1.122% in maximum coupling coefficient.

REFERENCES:
patent: 4511816 (1985-04-01), Mikoshiba et al.
patent: 4567393 (1986-01-01), Asai et al.
patent: 4571519 (1986-02-01), Kawabata et al.

Affiliated with

Also associated with

Rating

Surface acoustic wave device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Surface acoustic wave device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface acoustic wave device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-370475