Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

2008-03-04

2008-03-04

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S31300R, C310S364000

Reexamination Certificate

active

10595237

ABSTRACT:
A surface acoustic wave device includes a piezoelectric substrate made of LiNbO3having an electromechanical coupling coefficient k whose square is at least about 0.025, at least one electrode that is made of a metal whose density is greater than that of Al or an alloy primarily including the metal or that is composed of laminated films made of a metal whose density is greater than that of Al or an alloy primarily including the metal and another metal, the electrode being disposed on the piezoelectric substrate, a first insulating layer disposed in a region other than a region where the at least one electrode is disposed, the thickness of the first insulating layer being substantially equal to that of the electrode, and a second insulating layer covering the electrode and the first insulating layer. The density of the electrode is at least about 1.5 times greater than that of the first insulating layer.

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Official communication issued in the counterpart German Application No. 112004001841.2, mailed on Jul. 10, 2007.

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