Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

2007-02-20

2007-02-20

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S31300R, C310S364000

Reexamination Certificate

active

11050064

ABSTRACT:
There is provided a surface acoustic wave device which can prevent a breakage of electrodes and electrical breaks, decrease an insertion loss of elements, and enhance a Q-factor of resonators. Interdigital electrode sections and each have a laminated structure of a base layer made of TiN (titanium nitride) or TiOxNyand a main electrode layer deposited to come in contact with an upper surface of the base layer. The main electrode layer is deposited such that a {111} plane as a closest-packed plane of the main electrode layer has a constant gradient with respect to a surface of a substrate, and thus electromigration or stress migration can be suppressed in the interdigital electrode sections.

REFERENCES:
patent: 5500329 (1996-03-01), Kawai et al.
patent: 6297580 (2001-10-01), Takayama et al.
patent: 6542285 (2003-04-01), Batchko et al.
patent: 6630767 (2003-10-01), Inoue et al.
patent: 2002-305425 (2002-10-01), None

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