Surface acoustic wave device

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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Details

310313R, 310344, 310365, H01L 41053

Patent

active

059398175

ABSTRACT:
A surface acoustic wave element 11 having an inter digital electrode 12 formed on one surface of a piezo-electric substrate is arranged in a recess of a package 13 with the one surface being faced to a bottom surface of the recess of the package 13. An elastic conductive pad 35 having pads electrically connected to the electrode of the surface acoustic wave element 11 and electrodes of the package 13 is provided between the one surface of the surface acoustic wave element 11 and the package 13. The conductive pad 35 includes wiring means 35a, with which it is possible to connect the surface acoustic wave element 11 to the package 13 even when the position of the surface acoustic wave element in which the interdigital electrode is formed is deviated from the position of the electrodes of the package 13. The package 13 includes a cap 30 for pressing down the surface acoustic wave element 11. The surface acoustic wave element 11 is mounted on the conductive pad 35 in the package 13 with a surface of the surface acoustic wave element 11 on which the interdigital electrode is formed being down. Since the package 13 is hermetically sealed by the cap 30 while the surface acoustic wave element 11 being pressed down, the wire bonding becomes unnecessary, causing mounting to be facilitated. Further, the improvement of the quality of the device and its miniaturization are realized.

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