Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

1995-09-06

1997-12-16

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313B, 310313D, H01L 4108

Patent

active

056989270

ABSTRACT:
A surface acoustic wave device including a substrate made of a lithium tetraborate single crystal (Li.sub.2 B.sub.4 O.sub.7) whose cut and propagating direction are determined such that Euler cut angles (.psi., .theta., .phi.) are .psi.=+5.degree..about.-5.degree., .theta.=9.degree..about.29.degree. and 32.degree..about.86.degree. and .phi.=85.degree..about.95.degree., and an electrode structure formed on a surface of the substrate to realize a natural single-phase unidirectional transducer property together with an anisotropy of said substrate. A lithium tetraborate substrate having cut angles of (0.degree., 51.degree., 90.degree.) shows an ideal NSPUDT and a lithium tetraborate substrate having cut angles of (0.degree., 78.degree., 90.degree.) reveals a zero temperature coefficient of delay. A directionality reversed electrode structure or a directionality corrected electrode structure may be advantageously used.

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Proceedings of the Ultrasonics Symposium, Baltimore, Oct. 31-Nov. 3, 1993; vol. 1, Oct. 31, 1993; Levy M;McAvoy B R, pp. 185-188, XP000473555 Lam C S et al.: "A Low-Loss Saw Filter Using Two-Finger Per Wavelength Electrodes on the NSPUDT Orientation of Quartz"; p. 185, left-hand column, line 41--right-hand column, line 9; p. 186, left-hand column, line 11--right-hand column, line 2.

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