Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1991-05-23
1992-02-25
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310313D, H01L 4108
Patent
active
050916696
ABSTRACT:
An SAW convolver having a piezoelectric film / insulating layer / low impurity concentration Si epitaxial layer / high impurity concentration Si epitaxial layer structure is disclosed, in which the low impurity concentration Si epitaxial layer is replaced by a GaAs epitaxial layer. In this way, it is possible to improve concentration characteristics with respect to those obtained by the prior art structure described above and it is unnecessary to control the thickness of the epitaxial layer so strictly as for the prior art structure.
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patent: 4683395 (1987-07-01), Mitsutsuka
patent: 4757226 (1988-07-01), Mitsutsuka et al.
patent: 4900969 (1990-02-01), Mitsutsuka et al.
patent: 4967113 (1990-10-01), Mitsutsuka
"Integrating Acoustic Surface Wave and Silicon Transistor Technology", by R. Chicotka et al., IBM Tech. Disclosure Bulletin, vol. 13, No. 11, Apr. 1971.
"New Modes in III-V Monolithic SAW Devices", by J. Henaff et al., Inst. Phys. Conf. Ser. No. 63:Chapter 9; Int. Symp. GaAs and Related Compounds, 1981.
"New SSBW Mode in GaAs", by J. Henaff et al., 28 Apr. 1981, written for Electronics Letters, vol. 17, No. 12, 11 Jun. 1981.
Budd Mark O.
Clarion Co. Ltd.
Dougherty Thomas M.
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