Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2006-02-07
2006-02-07
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S195000, C310S31300R, C331S1160FE, C331S1070DP, C438S048000, C438S458000, C438S464000, C438S149000
Reexamination Certificate
active
06995634
ABSTRACT:
A surface-acoustic-wave component that comprises a first piezoelectric layer composed of zinc oxide (ZnO), a second piezoelectric layer composed of lithium niobate (LiNbO3), and a protective layer, which are sequentially formed on a silicon substrate, on which electrodes (e.g., interdigital transducers) are further formed. Alternatively, it comprises a conductive layer composed of zinc oxide (ZnO), a piezoelectric layer composed of lithium niobate (LiNbO3), and a protective layer, which are sequentially formed on a silicon substrate, on which electrodes are further formed. The piezoelectric layer can actualize preferable orientation so as to improve the electromechanical coupling coefficient (K2). Thus, it is possible to produce surface-acoustic-wave components that contribute to manufacturing of highly-integrated electronic circuits such as frequency filters and oscillators as well as electronic devices such as portable telephones.
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Higuchi Takamitsu
Iwashita Setsuya
Miyazawa Hiromu
Seiko Epson Corporation
Summons Barbara
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