Surface-acoustic-wave component adapted to electronic...

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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C333S195000, C310S31300R, C331S1160FE, C331S1070DP, C438S048000, C438S458000, C438S464000, C438S149000

Reexamination Certificate

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06995634

ABSTRACT:
A surface-acoustic-wave component that comprises a first piezoelectric layer composed of zinc oxide (ZnO), a second piezoelectric layer composed of lithium niobate (LiNbO3), and a protective layer, which are sequentially formed on a silicon substrate, on which electrodes (e.g., interdigital transducers) are further formed. Alternatively, it comprises a conductive layer composed of zinc oxide (ZnO), a piezoelectric layer composed of lithium niobate (LiNbO3), and a protective layer, which are sequentially formed on a silicon substrate, on which electrodes are further formed. The piezoelectric layer can actualize preferable orientation so as to improve the electromechanical coupling coefficient (K2). Thus, it is possible to produce surface-acoustic-wave components that contribute to manufacturing of highly-integrated electronic circuits such as frequency filters and oscillators as well as electronic devices such as portable telephones.

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