Surface acoustic wave and bulk acoustic wave devices using a Zn.

Details Surface acoustic wave and bulk acoustic wave devices using a Zn. Surface acoustic wave and bulk acoustic wave devices using a Zn.

1998-05-07

2000-10-03

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313R, H03H 925, H01L 4104

Patent

active

061277681

ABSTRACT:
The SAW device comprises a diamond or quartz substrate as a wave propagation layer, a piezoelectric layer on the wave propagation layer and at least one interdigitated electrode on the piezoelectric layer.

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H. Nakahata et al.; SAW Devices on Diamond; IEEE Ultrasonic Symposium pp. 1-10 (Dec. 1995).

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