Suppressor of hollow cathode discharge in a shower head...

Details Suppressor of hollow cathode discharge in a shower head... Suppressor of hollow cathode discharge in a shower head...

2007-12-06

2010-06-29

Hassanzadeh, Parviz (Department: 1792)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With gas inlet structure

C156S345330, C118S715000, C118S72300R, C029S890142

Reexamination Certificate

active

07744720

ABSTRACT:
A chamber component configured to be coupled to a process chamber and a method of fabricating the chamber component is described. The chamber component comprises a chamber element comprising a first surface on a supply side of the chamber element and a second surface on a process side of the chamber element, wherein the chamber element comprises a reentrant cavity formed in the first surface and a conduit having an inlet coupled to the reentrant cavity and an outlet coupled to the second surface. Furthermore, the chamber component comprises an insertable member configured to couple with the reentrant cavity, the insertable member having one or more passages formed there through and each of the one or more passages are aligned off-axis from the conduit, wherein the one or more passages are configured to receive a process fluid on the supply side and the conduit is configured to distribute the process fluid from the one or more passages on the process side.

REFERENCES:
patent: 5728223 (1998-03-01), Murakami et al.
patent: 5885358 (1999-03-01), Maydan et al.
patent: 2002/0088545 (2002-07-01), Lee et al.
patent: 2004/0168769 (2004-09-01), Matsuoka et al.
patent: 2005/0109460 (2005-05-01), DeDontney et al.
patent: 2006/0219362 (2006-10-01), Han et al.

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