Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – With means applying electromagnetic wave energy or...
Patent
1991-04-29
1992-05-26
Eldred, J. Woodrow
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
With means applying electromagnetic wave energy or...
361231, 361230, 250324, B01J 1908, H01T 2300, H05F 300
Patent
active
051165830
ABSTRACT:
A clean non-hydrogen-containing dry gas flows through the corona points of a clean room corona air ionizer in order to suppress the generation of particles.
REFERENCES:
patent: 4424549 (1984-01-01), Ensing
patent: 4665462 (1987-05-01), Blitshteyn et al.
K. Dillenbeck, "Selection of Air Ionization Within the Cleanroom", Proc. 32nd Annual Tech Mtg of the IES, pp. 387-392.
R. P. Donovan et al., "The Dependence of Particle Deposition Velocity on Surface Potential" 1987 Proc. of the IES, pp. 473-478.
B. Y. H. Liu et al., "Aerosol Charging and Neutralization and Electrostatic Discharge in Clean Rooms" J. Envir. Sci. Mar./Apr. 1987, pp. 42-46.
M. Suzuki et al., "Effectiveness of Air Ionization Systems in Clean Rooms" Proc. 34th Annual Tech. Mtg. of the IES (1988) pp. 405-412.
K. Murray et al., "Ozone and Small Particle Production by Steady State DC Hood Ionization: An Evaluation" 1989 EOS/ESD Symposium Proc. pp. 18-22.
K. D. Murray et al., "Hood Ionization in Semiconductor Wafer Processing: An Evaluation" 1988 EOS/ESD Symposium Proc. pp. 195-200.
Batchelder John S.
Gross Vaughn P.
Hobbs Philip C. D.
Miller Robert J.
Murray Kenneth D.
Eldred J. Woodrow
Feig Philip J.
International Business Machines - Corporation
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