Suppressing arc discharges

Details Suppressing arc discharges Suppressing arc discharges

2011-04-19

2011-04-19

Leja, Ronald W (Department: 2836)

Electricity: electrical systems and devices

Safety and protection of systems and devices

Ground fault protection

C204S192130

Reexamination Certificate

active

07929261

ABSTRACT:
For suppressing arc discharges in a plasma process, a method includes monitoring of at least one parameter of the plasma process, determining a temporal feature of a first countermeasure and performing the first countermeasure. The temporal feature is determined as a function of, for example, at least one of an interval in time from at least one previous countermeasure, a development of the at least one parameter since a relevant time of introduction of the countermeasure, or since a variable period of time ahead of the relevant time of introduction of the countermeasure, and a differentiation as to whether a previous countermeasure was triggered based on the behavior of the at least one parameter, or based on the interval in time from at least one previous countermeasure.

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