Supporting structure of optical element, exposure apparatus...

Details Supporting structure of optical element, exposure apparatus... Supporting structure of optical element, exposure apparatus...

2006-09-26

2006-09-26

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S053000, C359S820000

Reexamination Certificate

active

07113263

ABSTRACT:
A supporting structure for supporting an optical element includes a first supporting member for supporting the optical element, and a second supporting member for supporting the first supporting member. The value of a thermal expansion coefficient of the first supporting member is between those of the optical element and the second supporting member.

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