Supporting structure of optical element, exposure apparatus...

Details Supporting structure of optical element, exposure apparatus... Supporting structure of optical element, exposure apparatus...

2005-03-15

2005-03-15

Nguyen, Henry Hung (Department: 2851)

Photocopying

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Detailed holder for original

C355S053000, C359S620000

Reexamination Certificate

active

06867848

ABSTRACT:
A supporting structure for supporting an optical element. The supporting structure includes a first supporting member for supporting the optical element, a second supporting member arranged in an outer diameter side of the first supporting member for supporting the first supporting member, and an elastic member placed between the first supporting member and the second supporting member in the radial direction of the optical element. The inner diameter side of the elastic member is connected to the first supporting member while an outer diameter side of the elastic member is connected to the second supporting member. The elastic member is elastically deformable in the radial direction.

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