Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-05-23
2009-08-11
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S072000, C355S077000
Reexamination Certificate
active
07573560
ABSTRACT:
An exposure apparatus exposes a pattern onto a substrate. The exposure apparatus includes a supporting plate having a surface, a substrate stage which holds the substrate and is movable over the supporting plate, a liquid supply device having a supply nozzle which supplies liquid to the substrate, a first collection device which collects the liquid directly from the substrate, and a second collection device which collects liquid which has been discharged to the supporting plate.
REFERENCES:
patent: 3381879 (1968-05-01), Belcher et al.
patent: 4112632 (1978-09-01), Simpson
patent: 4168117 (1979-09-01), Work
patent: 5121710 (1992-06-01), Gonzalez
patent: 5194350 (1993-03-01), Matsuoka
patent: 5528118 (1996-06-01), Lee
patent: 5610683 (1997-03-01), Takahashi
patent: 5623853 (1997-04-01), Novak et al.
patent: 5689749 (1997-11-01), Tanaka et al.
patent: 5874820 (1999-02-01), Lee
patent: 6106712 (2000-08-01), New
patent: 6332723 (2001-12-01), Matsuyama et al.
patent: 6364547 (2002-04-01), Matsuyama et al.
patent: 6509957 (2003-01-01), Tanaka
patent: 6688045 (2004-02-01), Pilcher
patent: 6809794 (2004-10-01), Sewell
patent: 7130037 (2006-10-01), Lange
patent: 2002/0066140 (2002-06-01), Gerloff
patent: 2003/0036282 (2003-02-01), Usui et al.
patent: 2003/0104170 (2003-06-01), Johnston et al.
patent: 2003/0177703 (2003-09-01), Forbis, Sr. et al.
patent: 2004/0009620 (2004-01-01), Saito et al.
patent: 2004/0160582 (2004-08-01), Lof et al.
patent: 2005/0219488 (2005-10-01), Nei et al.
patent: 2006/0023181 (2006-02-01), Novak
patent: 2006/0077367 (2006-04-01), Kobayashi et al.
patent: 2006/0132737 (2006-06-01), Magome et al.
patent: 2006/0139614 (2006-06-01), Owa et al.
patent: 1 571 695 (2005-09-01), None
patent: 1 628 329 (2006-02-01), None
patent: A-6-124873 (1994-06-01), None
patent: A-10-303114 (1998-11-01), None
patent: WO 99/49504 (1999-09-01), None
patent: WO 2004/053953 (2004-06-01), None
Mathews Alan A
Nikon Corporation
Oliff & Berridg,e PLC
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